However, a purely feedback control can be insufficient for compensation of all the errors, requiring post processing in the form of laser trimming to achieve higher levels of performance. However, a dual excitation and phase detection mode has recently been proposed, since phasebased detection, as opposed to amplitudebased. Design and analysis of mems gyroscope comsol multiphysics. Simulation of the mems vibratory gyroscope through simulink. Dynamic characteristics of resonators for mems resonant vibratory gyroscopes are studied in this paper. This makes the gyroscope a good replacement for a magnetic compass, particularly in regions where magnetic compasses are unreliable.
A study on resonant frequency and q factor tunings for mems vibratory gyroscopes. Mems rate gyroscopes are prone to different errors because of environmental. Mems vibratory gyroscopes is a must have book for engineers in both industry and academia who specialize in the design and manufacture of gyroscopes. Mems multivibrating ring gyroscope for space applications. A vibrator comprising a base part at least one of whose ends is fixed, a first leg extending in a direction crossing this base part, a second leg extending in a direction crossing the base part and being opposed to said first leg with respect to said base part, a first bendingvibration piece extending in a direction crossing said first leg, a second bendingvibration piece extending in a. Study of dynamic characteristics of resonators for mems.
Mems coriolis vibratory gyroscopes cvgs are classi. The fabricated gyroscope comprises a gyroscopic element with two gimbals, driving and sensing coils. In the literature, vibratory mems gyroscopes are mostly used in a single excitation and amplitude detection mode. Read vibration sensitivity analysis of mems vibratory ring gyroscopes, sensors and actuators a. Us6046531a vibrator, vibratory gyroscope, and linear. However, it seems that many of problems and difficulties for designing the micro gyroscopes still remain. It is a spinning wheel or disc in which the axis of rotation spin axis is free to. In this paper, a novel method is proposed for finding the best excitation signal frequency of the mems vibratory gyroscope sensors. This paper presents a mpc model predictive control algorithm for mems vibratory gyroscopes based on forcebalancing control strategy.
More recently, very carefully engineered gyroscopes were used for navigation because the axis of spin points in a nearly fixed direction when external torques are small. Designs that were used to produce micromechanical gyroscopes are shown in. Mems vibratory gyroscopes are composed generally of a proof mass with elastic beams and corresponding combs in both directions for capacitance detection in asic interfaces. A planar vibratory gyroscope using electromagnetic force. There is no demodulation and modulation components in the control loop, and a band pass filter is applied as a controller to accomplish the feedback control. In the problem of control ling vibratory gyroscopes, tracking of periodic referenc e signals is required. Most mems gyroscopes based on silicon vibratory sensors utilizes the energy transfer between the two vibratory modes suffers serious drawback in producing identical resonating modes and hence to attain a sub. Pdf simulation of the mems vibratory gyroscope through. Kugi, modelbased control concepts for vibratory mems gyroscopes, mechatronics,22,3,241250,2012. Mems micro electro mechanical systems technologies were developed by applying semiconductor microfabrication technologies to make threedimensional microstructures and mechanical systems. Product documentation and quick start circuit keywords.
This book provides the latest theoretical analysis and design methodologies of different types of coriolis vibratory gyroscopes cvg. Mems gyroscope gyroscope inertial navigation system. A planar vibratory gyroscope using electromagnetic force is proposed and tested. The proposed approach develops an online identifier scheme, by rewriting the dynamic model of mems gyroscope. In recent years mems gyroscopes have gained popularity for use as rotation rate sensors in commercial products like, mobile handsets automobile game consoles department of mechanical engineering 8 9. Mems vibratory gyroscopes structural approaches to. This study deals with such design problems on micromachined gyroscopes. The structures performance is enhanced by utilizing springs with bends that play a significant role in reducing the devices sensitivity to.
Introduction in recent years, advancement in micromachining technologies made mems based gyroscopes increasingly common. Effects of linear acceleration in a harmonically excited proof mass. Pdf dynamics of micromechanical coriolis vibratory gyroscopes. Halonen, member, ieee abstractin this paper, issues related to the zerorate output zro of a vibratory microgyroscope are studied. A project report on mems vibratory gyroscope simulation and sensitivity analysis submitted to. Pdf integrated microelectromechanical gyroscopes researchgate. Physical on deepdyve, the largest online rental service for scholarly research with thousands of academic publications available at your fingertips. A unique balance between theory and practical design issues.
A nonlinear multiplier terminating the drive loop is designed for rapid resonance oscillation and. Pdf a study on resonant frequency and q factor tunings for. Ece, tongji university, shanghai, china, june, 2005 042009 thesis advisor. Momeni tarbiat modares university, faculty of engineering, control systems department, tehran, iran abstractthis paper presents a systematic approach to obtain governing equations of micro electro mechanical gyroscopes. Oct 27, 2016 this article discusses the various control mechanisms for mems coriolis vibratory gyroscopes cvg, and how they can be applied with the commercial offtheshelf hf2li lockin amplifier. A novel amplitudephase information extraction architecture for mems vibratory gyroscopes using a modified double sideband demodulation configuration. Mems gyroscopes, the signal detection is always a very challenging issue. A mems gyroscope is a micromachined inertial device that can be used to measure the angular rate of rotation or the angle of orientation. In microelectromechanical vibratory gyroscopes, feedback control is a common strategy in attempting to correct the imperfections. Control of mems coriolis vibratory gyroscopes eeweb community. Single degree of freedom gyro sdfg wheel bearings must be stiff and isoelastic, and for both sdfgs and dynamically tuned gyros dtgs the bearings must be noiseless, as low friction as possible, and must start at low temperatures.
A vibrating structure gyroscope functions much like the halteres of flies insects in the order diptera. Senturia professor of electrical engineering, emeritus massachusetts institute of technology cambridge, massachusetts. A simplified model of vibratory gyros is shown in figure 1. In the proposed method, the amplitude of the drive mode displacement is the criterion to choose the proper excitation signal frequency. Author links open overlay panel sang won yoon a b sangwoo lee a khalil najafi a. Micromechanical vibratory gyroscopes or angular rate sensors have a large potential for different types of applications as primary information sensors for guidance, control and navigation systems. Mems vibratory gyroscope simulation and sensitivity analysis kanwar 2015 1.
The scale factor represents a proportion between the measured voltage and the input angular rate. Temperature and humidity effects on mems vibratory gyroscope conference paper pdf available january 2011 with 212 reads how we measure reads. The large sensing amplitude for both operational modes is projected. Firstly, a small parameter method is introduced to analyze the dynamic characteristic stability of the resonator. The control algorithm tunes the resonant frequency of the gyroscope to the specified resonant frequency and maintains the specified amplitude of oscillation by altering the gyroscope dynamics.
Proceedings of 20th biennial conference on mechanical vibration and noise. However, the development of the vibratory gyroscope involves a number of technical difficulties. Kugi, modelbased control concepts for vibratory mems gyroscopes. Mems gyroscopes microelectromechanical systems mems gyroscope is a sensor that measures angle or rate of rotation. Top free ebooks download modern graphics communication mastering audio. This separates gyros from any other means of measuring rotation, such as a tachometer or potentiometer. Mems gyroscope technology provides cost effective method for improving directional estimation and overall accuracy in the navigation systems. Us9459100b2 stepped sinusoidal drive for vibratory.
Mems vibratory gyroscopes provides a solid foundation in the theory and. A novel selfcalibration method and experiment of mems. Vibration sensitivity analysis of mems vibratory ring. Fabrication defects and perturbations affect the behavior of a vibratory mems gyroscope sensor, which makes it difficult to measure the rotation angular rate. Mems vibratory gyroscopes, but it deserves our attention if we are to achieve tactical grade performance for military applications. Article information, pdf download for effects of linear acceleration in a harmonically. Vibration sensitivity analysis of mems vibratory ring gyroscopes. Mems gyroscopes, envelope model, capacitive sensors and actuators, quadrature error, force feedback. Structural approaches to improve robustness mems reference shelf. The micromachined gyroscopes of this class are expected to.
This paper presents a novel adaptive approach that can identify, in an online fashion, angular rate and other system parameters. Aug 16, 2007 gyroscope is a blend of puzzle and platformer packed together in one addictive package. Figure 2 plots a standard model of the sensitive structure for mems gyroscopes. Mems vibratory gyroscopes structural approaches to improve. Mems gyroscope free download as powerpoint presentation. Control of mems coriolis vibratory gyroscopes eeweb. Zerorate output and quadrature compensation in vibratory. A gyroscope is a device used for measuring or maintaining orientation and angular velocity. Mems gyroscopes, or strictly speaking mems angular rate sensors, are used whenever rate of turn s sensing is required without a fixed point of reference. The two main types of mems gyroscope, discussed in micromachined vibrating gyroscopes.
In this paper, a novel narrowband force rebalance control method for the sense mode of a mems vibratory gyroscope is presented in detail. Parameter estimation of mems gyroscope using local state. In the proposed mpc method, using a set of orthonormal basis functions named laguerre functions, a new prediction. Active structural error suppression in mems vibratory rate. The most common type is the mems vibratory gyroscope mvg. Transfer of energy between two vibrating resonator is by coriolis acceleration. Theory and design of micromechanical vibratory gyroscopes.
Structural approaches to improve robustness mems reference shelf acar, cenk, shkel, andrei on. Tutorial gyroscopes this work covers elements of the syllabus for the engineering council exam d225 dynamics of mechanical systems. Micro machined gyroscopes use vibrating mechanical. The design incorporates two sets of rings, inner and outer, separated by a set of perforated inertial masses and connected to the outermost anchors by the means of springs. This paper proposes an interface applicationspecificintegratedcircuit asic for microelectromechanical systems mems vibratory gyroscopes. Such a gyroscope has the advantages of simple fabrication and large output characteristics compared with an electrostatic gyroscope. A lownoise interface circuit for mems vibratory gyroscope. Mems vibratory gyroscope simulation and sensitivity. The topic of unknown parameters estimation of a mems gyroscope system in realtime is proposed and discussed.
Download fulltext pdf dynamics of micromechanical coriolis vibratory gyroscopes article pdf available in sensor letters 234. Almost all reported to date micromachined vibratory gyroscopes mvg are of type ii. Control of mems coriolis vibratory gyroscopes page 2 theoretical background a gyroscope is an inertial device for measuring the angle of orientation or angular rate of rotation with respect to the inertial frame of reference. Selvakumar rajalakshmi engineering college, chennai 602105 india email.
Stepped sinusoidal drive for vibratory gyroscopes pctep2015061079 wo2015177192a1 en. A cmos asic has been designed and implemented for readout and control of mems vibratory gyroscopes. Mems vibratory gyroscopes are increasingly used in applications ranging from consumer electronics to. Pdf microelectromechanical mems gyroscopes have wideranging applications including automotive and. Environmentally robust mems vibratory gyroscopes for automotive. Gyroscopes would be more reliable, and less expensive, if they had neither spinning wheels nor flotation fluids. A novel method for finding the best excitation frequency. Pdf a packaged silicon mems vibratory gyroscope for. Overview a tuning fork mems gyroscope is designed with a perforated proof mass. The perforation enables the release of the proof mass during etching process in the fabrication. The objective is to collect all the goodies and head for the exit of each level. The drift cancellation is accomplished by periodically reversing. A low noise design is achieved by using the technique of sinusoidal chopper stabilization with a.
A closed selfexcited drive loop is employed for automatic amplitude stabilization based on peak. A vibrating structure gyroscope, defined by the ieee as a coriolis vibratory gyroscope cvg, is a gyroscope that uses a vibrating structure to determine the rate of rotation. Up to 3axis gyroscope, accelerometer and magnetometer data can be processed into a full 3d quaternion orientation estimate, with the use of a nonlinear passive complementary filter. This paper proposes a new oscillation control algorithm for vibratory micromachined gyroscope system. Micromachines free fulltext single drive multiaxis gyroscope. Zaxis vibratory gyroscopes 68 usually use comb fingers to sense the capacitance change, typically having device. In order to adapt the mpc to track period ic reference signals with zero steadystate error, the. Mems gyroscopes generally use a vibrating mechanical element as a. To assess the performance of the proposed method in comparison with other common ones, a pllbased control. Analysis of compensation for a gsensitivity scalefactor. A closed selfexcited drive loop is employed for automatic amplitude stabilization based on peak detection and proportionintegration pi controller.
Modelbased control concepts for vibratory mems gyroscopes. Mems vibratory gyroscopes are increasingly used in applications ranging from consumer electronics to aerospace and are now one. In particular, mems gyroscopes with their reduced cost, size, weight, and power consumption have a lot. This reduces or eliminates the corresponding thermal and diestress effects otherwise needing calibration. Design and analysis of a mems comb vibratory gyroscope. Mems vibrating mass gyroscopes aimed to create smaller, more sensitive devices. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common microfabrication processes and. The work is then linked with earlier studies of materials and mechanisms to enable you to solve integrated problems. Environmentally robust mems vibratory gyroscopes for. Operational principles and design issues of mems vibratory gyroscopes are also addressed.
In the first part, the dynamics of the vibratory gyroscope sensing. Advanced control design of mems vibratory gyroscopes. Even after the introduction of laser ring gyroscopes, a lot of properties were desired. Inertial mems and sensors technologies, analog devices inc. Pdf research on laser trimming of silicon mems vibratory.
Design and analysis of a mems comb vibratory gyroscope haifeng dong, xingguo xiong. These keywords were added by machine and not by the authors. Advanced control design of mems vibratory gyroscopes abstract. It is proved that geometrical parameters of the resonator have to be regulated to match corresponding stability analysis. Design and simulation of mems piezoelectric gyroscope.
The momentum of such a wheel causes it to retain its attitude when the framework is tilted. Theory and design of micromechanical vibratory gyroscopes 175 oscillatory continuous discrete multiple single hrg ring tuning fork single mass beam gimballed wheel rotary dtg figure 2. The most common mems gyroscope is the cvg which is a massspringdamper. Microelectromechanical systems mems vibratory gyroscopes have had important applicable value in various fields, such as national economy, national defense, military, and navigation fields, for the past few years.
This application note gives an overview of different control mechanisms for mems coriolis vibratory gyroscopes cvg and how they are implemented using the commercial offtheshelf hf2li lockin amplifier. This process is experimental and the keywords may be updated as the learning algorithm improves. System modeling of mems gyroscopes ramyar rashed and h. An interface asic for mems vibratory gyroscopes with. System identification of mems vibratory gyroscope sensor. In mems devices, because of the large surfacetovolume ratio and small spacing between static and moving structures, viscous damp. Preprint submitted to mechatronics may 17, 2011 postprint version of the article. A packaged silicon mems vibratory gyroscope for microspacecraft. This paper presents the design of a novel multiring vibratory gyroscope. Mems vibratory gyroscopes structural approaches to improve robustness mems reference shelf series editors.
Conformal memsidt gyroscopes and their comparison with. Pdf temperature and humidity effects on mems vibratory. There are a wide variety of possible applications for vibratory gyroscopes. Unfortunately, in general mems gyroscopes developed to late are so low mass that they do not have the resolution to compete with entrenched larger gyros, even for space applications. Mems vibratory gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In comb drive vibratory gyroscopes, driveinduced coriolis accelerometer offset is effectively canceled by demodulating the output during equal times of inphase and antiphase drive of the shuttle with respect to the velocity signal used for angular rate demodulation. Constantfrequency oscillation control for vibratory micro. Micromachined gyroscopes are suitable for familiar products such as a vtr, auto mobile and toy, where cost effective and mass production are required. Modelling of mems vibratory gyroscopes utilizing phase. Index terms mems, gyroscopes, agc, vga, drive loop.
A novel narrowband force rebalance control method for the. The cost of mems gyroscopes is expected to reduce drastically in the next. It takes the idea of the foucault pendulum and uses a vibrating element. The proof mass used in the design enables the reduction of damping effect. The invent of mems gyroscope made the use of gyroscope easier and valuable. Pdf environmentally robust mems vibratory gyroscopes for. The fun part is that youll be able to climb on walls and even walk on ceilings. Asic for microelectromechanical systems mems vibratory gyroscopes.
Vibratory gyroscope article about vibratory gyroscope by. They represent an important inertial technology because other gyroscopes such as solidstate gyroscopes, laser ring gyroscopes and fibre optic. Mems gyroscopes are popular in some consumer electronics, such as. The mems vibratory gyroscopic sensor element 104 has a high q factor that enables the vibratory gyroscopic sensor element 104 to act as a lowpass filter with a sharp drop off at frequencies above the 25 khz. Type i and type ii micromachined vibratory gyroscopes. Pdf simulation of the mems vibratory gyroscope through simulink. Structural design tradeoffs for mems vibratory rate gyroscopes with 2dof sense modes adam r. Model predictive control of mems vibratory gyroscope. Selvakumar rajalakshmi engineering college, chennai 602105 india. Pdf model predictive control of mems vibratory gyroscope.
25 862 348 1303 1509 1114 333 380 852 545 257 660 908 1228 1288 145 909 1532 863 228 391 1514 1052 241 103 757 1231 1015 689 820 988 1248 460 432 399 1090 658 356 1229 284 803